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Proceedings Paper

Coupled MOEMS membranes for enhanced sensing purposes
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Paper Abstract

The electromechanical actuation of two silicon nitride membranes forming a monolithic MOEMS is investigated. By controlling the tensile stress of the high quality membranes via a piezoelectrically controlled compressive force applied to the chip we demonstrate tuning of their mechanical spectrum, as well as strong intermode electromechanical coupling. Piezoelectric actuation is shown to enhance the nonlinear response of the membranes, which is evidenced by parametric amplification of the thermal fluctuations. Such a MOEMS array represents an attractive tunable and versatile platform for optomechanics and sensing applications.

Paper Details

Date Published: 28 February 2020
PDF: 8 pages
Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930X (28 February 2020);
Show Author Affiliations
Andreas Naesby Rasmussen, DFM A/S, Danish National Metrology Institute (Denmark)
Univ. of Aarhus (Denmark)
Sepideh Naserbakht, Aarhus Univ. (Denmark)
Aurélien Dantan, Aarhus Univ. (Denmark)


Published in SPIE Proceedings Vol. 11293:
MOEMS and Miniaturized Systems XIX
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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