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Proceedings Paper

Photonic terahertz technology for layer thickness measurements (Conference Presentation)

Paper Abstract

Layer-thickness measurement is one of the most promising and attractive fields of application for terahertz measurement systems, as they really provide benefits in comparison to competing techniques. In contrast to ultrasound systems, terahertz measurements can be carried out without a coupling medium and is therefore a truly contactless measurement. The possibility to measure individual layers in a multilayer stack is highly advantageous in contrast to established eddy current measurement devices. Unlike X-ray devices, terahertz radiation of common measurement systems is not harmful to biological tissue. Terahertz measurement systems have undergone a remarkable development in terms of the performance as well as in the evaluation algorithms. Increase of speed and enhancement of measurement robustness make these optically complex systems ready for industrial employment. In our contribution, we will cover the development of photonic terahertz measurement systems with a focus on terahertz layer thickness determination.

Paper Details

Date Published: 30 March 2020
PDF
Proc. SPIE 11348, Terahertz Photonics, 1134804 (30 March 2020); doi: 10.1117/12.2553340
Show Author Affiliations
Daniel Molter, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Jens Klier, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Stefan Weber, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Landesforschungszentrum OPTIMAS, Technische Univ. Kaiserslautern (Germany)
Tobias Pfeiffer, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Landesforschungszentrum OPTIMAS, Technische Univ. Kaiserslautern (Germany)
Michael Kolano, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Oliver Boidol, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Mirco Kutas, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Landesforschungszentrum OPTIMAS, Technische Univ. Kaiserslautern (Germany)
Björn Haase, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Landesforschungszentrum OPTIMAS, Technische Univ. Kaiserslautern (Germany)
Joachim Jonuscheit, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Georg von Freymann, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)
Landesforschungszentrum OPTIMAS, Technische Univ. Kaiserslautern (Germany)


Published in SPIE Proceedings Vol. 11348:
Terahertz Photonics
Mona Jarrahi; Sascha Preu; Dmitry Turchinovich, Editor(s)

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