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Proceedings Paper

The full aperture processing technical research in fabricating large sapphire window element
Author(s): Heng Zhu; Heng Zhao M.D.; Zhi-gang Li M.D.; Ding-yao Yan; Ping Ma D.D.S.
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Paper Abstract

This article mainly take the research in controlling the parameters in the full aperture fine grinding and polishing stage of the 350mm×300mm×10mm size sapphire window. In the period of full aperture fine grinding period ,by adjusting the grinding parameters, the whole aperter parallel error of the sapphire window conversed to the level of below 3".In the period of full aperture polishing period , by adjusting the polishing parameters including the vaccum adsorbing parameterm, with those measures the wavefront error conversed to the PV value of 2λ(λ=632.8nm), the whole aperture parallel error of the sapphire window conversed to the level of below 3", and the inside arbitrary Φ100mm aperture’s parallel error also conversed to the level of below 3", the roughness of the polishing face attained to the value Rq≤2nm.Through the technical research in the full aperter processing of the sapphire window , the wavefront error, the parallel error and the surface roughness are well controlled which provide the fine results import in the fine sub-aperture polishing period.

Paper Details

Date Published: 31 January 2020
PDF: 6 pages
Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 1142746 (31 January 2020); doi: 10.1117/12.2553184
Show Author Affiliations
Heng Zhu, Fine Optical Engineering Research Ctr. (China)
Heng Zhao M.D., Fine Optical Engineering Research Ctr. (China)
Zhi-gang Li M.D., Fine Optical Engineering Research Ctr. (China)
Ding-yao Yan, Fine Optical Engineering Research Ctr. (China)
Ping Ma D.D.S., Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 11427:
Second Target Recognition and Artificial Intelligence Summit Forum
Tianran Wang; Tianyou Chai; Huitao Fan; Qifeng Yu, Editor(s)

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