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Proceedings Paper

Superhard protective antireflection diamond-like carbon films
Author(s): Kaihu Fu; Yongqing Shen; Xu Zhang; Yangli Jin; Chengkui Zu; Yonghua Liu
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Paper Abstract

Superhard protective antireflection Diamond-like carbon (DLC) film, consisting of a-C:H/ta-C, was fabricated using the combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and Filtered Cathodic Vacuum Arc (FCVA). The structure of a-C:H/ta-C film was analyzed by Raman, XPS, SEM, Infrared spectroscopy. Comparing with the conventional protective antireflection a-C:H film, a-C:H/ta-C film presents much higher nanohardness (52.82GPa), greatly enhanced wear resistance and unreduced infrared transmittance in 8~12μm waveband.

Paper Details

Date Published: 31 January 2020
PDF: 8 pages
Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114273A (31 January 2020);
Show Author Affiliations
Kaihu Fu, China Building Materials Academy (China)
Yongqing Shen, Beijing Normal Univ. (China)
Xu Zhang, Beijing Normal Univ. (China)
Yangli Jin, China Building Materials Academy (China)
Chengkui Zu, China Building Materials Academy (China)
Yonghua Liu, China Building Materials Academy (China)

Published in SPIE Proceedings Vol. 11427:
Second Target Recognition and Artificial Intelligence Summit Forum
Tianran Wang; Tianyou Chai; Huitao Fan; Qifeng Yu, Editor(s)

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