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Proceedings Paper

Single nanoparticle detection in the far field by nonlinear optical method
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Paper Abstract

Detection of a single nanoparticle on a bare silicon wafer has been a challenge in the semiconductor industry for decades. Currently, the most successful and widely used technique is dark-field microscopy. However, it is not capable of detecting single sub-10 nm particles owing to a low signal-to-noise ratio (SNR). As a new approach, we suggest using the second harmonic generation (SHG) to detect a single nanoparticle. The second harmonic generation in centrosymmetric materials, like silicon, is forbidden except for a thin and additionally increase local field factors, allowing for their persistent detection. Choosing the proper surface and increasing SNR. We demonstrate the feasibility of the nonlinear dark-field microscopy concept by detecting an isolated 80-nm silicon nanoparticle on the silicon wafer.

Paper Details

Date Published: 1 April 2020
PDF: 7 pages
Proc. SPIE 11358, Nonlinear Optics and its Applications 2020, 1135802 (1 April 2020);
Show Author Affiliations
EunHee Jeang, SAMSUNG Electronics (Korea, Republic of)
Boris Afinogenov, SAMSUNG Research Russia Ctr. (Russian Federation)
Sangwoo Bae, SAMSUNG Electronics (Korea, Republic of)
TaeHyun Kim, SAMSUNG Electronics (Korea, Republic of)
Ingi Kim, SAMSUNG Electronics (Korea, Republic of)
Kyunghun Han, SAMSUNG Electronics (Korea, Republic of)
Akinori Ohkubo, SAMSUNG Electronics (Korea, Republic of)
SangMin Lee, SAMSUNG Electronics (Korea, Republic of)
MinHwan Seo, SAMSUNG Electronics (Korea, Republic of)
Seulgi Lee, SAMSUNG Electronics (Korea, Republic of)
Wondon Joo, SAMSUNG Electronics (Korea, Republic of)
Hosun Yoo, SAMSUNG Electronics (Korea, Democratic Peoples Republic of)
Anton Medvedev, SAMSUNG Research Russia Ctr. (Russian Federation)
Aleksandr Shorokhov, SAMSUNG Research Russia Ctr. (Russian Federation)
Anton Sofronov, SAMSUNG Research Russia Ctr. (Russian Federation)
Maksim Riabko, SAMSUNG Research Russia Ctr. (Russian Federation)
Vladimir Bessonov, Lomonosov MSU (Russian Federation)
Ilya Antropov, Lomonosov MSU (Russian Federation)


Published in SPIE Proceedings Vol. 11358:
Nonlinear Optics and its Applications 2020
Neil G. R. Broderick; John M. Dudley; Anna C. Peacock, Editor(s)

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