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Proceedings Paper • Open Access • new

Interferometric system for Pm‐level stability characterization
Author(s): A. L. Verlaan; J. D. Ellis; D. Voigt

Paper Abstract

We present a double sided, single pass Michelson heterodyne interferometer for dimensional stability measurements. In preliminary measurements, the double deadpath configuration (no sample) showed better than ±1.5 nm (2σ) over 13 hours. A 30 mm stainless gauge block was then measured with a stability of ±1.2 nm (2σ) over 9 hours. The interferometer was then moved to a facility capable of measuring in vacuum. In a pressure sealed environment, but not vacuum, the interferometer stability was better than ±0.6 nm (2σ) over 23 hours. Using a Fourier analysis on this drift measurement, the limiting factor is the slight spatial gradients in the refractive index. With relatively large air paths greater than 400 mm, refractive index fluctuations on the order of parts in 109 are needed to cause this drift.

Paper Details

Date Published: 5 September 2019
PDF: 7 pages
Proc. SPIE 10565, International Conference on Space Optics — ICSO 2010, 1056569 (5 September 2019); doi: 10.1117/12.2552558
Show Author Affiliations
A. L. Verlaan, TNO Science and Industry (Netherlands)
J. D. Ellis, Delft Univ. of Technology (Netherlands)
D. Voigt, VSL Dutch Metrology Institute (Netherlands)


Published in SPIE Proceedings Vol. 10565:
International Conference on Space Optics — ICSO 2010
Errico Armandillo; Bruno Cugny; Nikos Karafolas, Editor(s)

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