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Proceedings Paper

Effects of magnetorheological processing parameters on the mid-spatial frequency errors of optics
Author(s): Jing Hou; Xian-hua Chen; Shi-wei Liu; Nan Zheng; Bo Zhong; Wen-hui Deng
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Paper Abstract

By virtue of the characteristics of high machining certainty, fast surface shape convergence and less subsurface damage, magnetorheological finishing (MRF) has been widely applied in ultra-precision machining for optics. However, the convolution of tool influence function (TIF) and the regular movement track make it difficult to avoid the deterioration of mid-spatial frequency (MSF) errors in the MRF process, which will affect the optical properties of optics. In this paper, the main factors affecting the MSF errors in grating path processing are theoretically analyzed. Under the condition of determinate polishing spot, the main influencing factors are the removal depth and processing spacing of a single scan. Through experimental research, the influence of removal depth and processing spacing of a single scan on the MSF errors in the MRF process is acquired. On this basis, the preferred parameters of removal depth and processing spacing of a single scan under specific processing conditions in the MRF process are obtained with the MSF errors of 1 nm as the evaluation index. It provides a theoretical basis and reference value for suppressing the deterioration of MSF errors of optics during MRF process and obtaining high quality optical surfaces.

Paper Details

Date Published: 31 January 2020
PDF: 5 pages
Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114272P (31 January 2020); doi: 10.1117/12.2552472
Show Author Affiliations
Jing Hou, China Academy of Engineering Physics (China)
Xian-hua Chen, China Academy of Engineering Physics (China)
Shi-wei Liu, China Academy of Engineering Physics (China)
Harbin Institute of Technology (China)
Nan Zheng, China Academy of Engineering Physics (China)
Bo Zhong, China Academy of Engineering Physics (China)
Wen-hui Deng, China Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 11427:
Second Target Recognition and Artificial Intelligence Summit Forum
Tianran Wang; Tianyou Chai; Huitao Fan; Qifeng Yu, Editor(s)

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