Share Email Print
cover

Proceedings Paper

Critical-dimension grazing-incidence small angle X-Ray scattering: applications and development (Conference Presentation)
Author(s): Guillaume Freychet; Dinesh Kumar; Isvar A. Cordova; Ron J. Pandolfi; Patrick P. Naulleau; Cheng Wang; Alex Hexemer

Paper Abstract

As the lithographically manufactured nanostructures are shrinking in size, conventional techniques, such as microscopies (SEM, AFM) reach their resolution limits. We have developed a high-performance Grazing Incidence SAXS simulation tool to reconstruct the in-depth profile highly ordered material such as line gratings [1, 2]. Here, we will present the latest development and applications of the technique using x-rays to characterize line gratings and contact holes. Specifically, we will show how the CD-GISAXS approach has been extended to extract the in-depth profile dispersion of the lines, leading to a quantification of the line edge roughness. Finally, by introducing a recent study which harnessed the chemical sensitivity provided by soft x-ray scattering to extract latent image profiles from resists [3], we highlight new applications for this technique with high potential.

Paper Details

Date Published: 24 March 2020
PDF
Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113251A (24 March 2020);
Show Author Affiliations
Guillaume Freychet, Brookhaven National Lab. (United States)
Dinesh Kumar, Lawrence Berkeley National Lab. (United States)
Isvar A. Cordova, The Ctr. for X-Ray Optics (United States)
Ron J. Pandolfi, Advanced Light Source (United States)
Patrick P. Naulleau, The Ctr. for X-Ray Optics (United States)
Cheng Wang, Lawrence Berkeley National Lab. (United States)
Alex Hexemer, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 11325:
Metrology, Inspection, and Process Control for Microlithography XXXIV
Ofer Adan; John C. Robinson, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray