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Proceedings Paper

An automated system for checking process friendliness and routability of standard cells
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Paper Abstract

In this paper, we propose methodologies used in a software system for checking process friendliness (including lithography friendliness) and routability (including pin accessibility) of standard cells. In the process of designing physical layouts of standard cells, it is essential to consider their process friendliness since specific cells have very high tendencies to create process weakpoints (which include lithography hotspots) after their instances are placed and routed. On the other hand, at advanced process nodes, the routability of standard cells must also be considered since there are combined trends of increasing pin densities and increasing design rule complexities. Experimental results show that our software system is able to effectively detect problematic standard cells which have critical process friendliness and/or routability issues.

Paper Details

Date Published: 23 March 2020
PDF: 10 pages
Proc. SPIE 11328, Design-Process-Technology Co-optimization for Manufacturability XIV, 1132809 (23 March 2020); doi: 10.1117/12.2551981
Show Author Affiliations
I-Lun Tseng, GLOBALFOUNDRIES Singapore Pte. Ltd. (Singapore)
Punitha Selvam, GLOBALFOUNDRIES Inc. (United States)
Zhao Chuan Lee, GLOBALFOUNDRIES Singapore Pte. Ltd. (Singapore)
Vikas Tripathi, GLOBALFOUNDRIES Singapore Pte. Ltd. (Singapore)
Chun Ming Tommy Yip, GLOBALFOUNDRIES Singapore Pte. Ltd. (Singapore)
Jonathan Yoong Seang Ong, GLOBALFOUNDRIES Singapore Pte. Ltd. (Singapore)


Published in SPIE Proceedings Vol. 11328:
Design-Process-Technology Co-optimization for Manufacturability XIV
Chi-Min Yuan, Editor(s)

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