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Proceedings Paper

Atom probe tomography using extreme-ultraviolet light
Author(s): Luis Miaja-Avila; Ann N. Chiaramonti; Benjamin W. Caplins; David R. Diercks; Brian P. Gorman; Norman A. Sanford
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Paper Abstract

We present a different approach to laser-assisted atom probe tomography, where instead of using a near-UV laser for inducing a thermal transient, we use an extreme-ultraviolet coherent light source to trigger field ion emission at the tip's apex. The use of extreme-ultraviolet photons in atom probe tomography opens the potential for an athermalfield ionization pathway.

Paper Details

Date Published: 20 March 2020
PDF: 6 pages
Proc. SPIE 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV, 113250A (20 March 2020); doi: 10.1117/12.2551898
Show Author Affiliations
Luis Miaja-Avila, National Institute of Standards and Technology (United States)
Ann N. Chiaramonti, National Institute of Standards and Technology (United States)
Benjamin W. Caplins, National Institute of Standards and Technology (United States)
David R. Diercks, Colorado School of Mines (United States)
Brian P. Gorman, Colorado School of Mines (United States)
Norman A. Sanford, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 11325:
Metrology, Inspection, and Process Control for Microlithography XXXIV
Ofer Adan; John C. Robinson, Editor(s)

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