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Proceedings Paper

Nonlinear mode coupling in a MEMS resonator
Author(s): David A. Czaplewski; Daniel López; Oriel Shoshani; Steven W. Shaw
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Paper Abstract

A single micro-electromechanical (MEMS) resonator can be shown to exhibit behaviors unexpected in a simple resonant structure. For small driving forces, the resonator displays typical simple harmonic oscillator response. As the driving force is increased, the resonator shows the slightly more complex, but well understood, Duffing response. Rather unexpected response behavior can appear when the resonator frequency is detuned by nonlinearity to where two oscillatory modes of the resonator begin to interact through nonlinear coupling due to an internal resonance. The paper focuses on how the resonator response changes as the internal resonance is approached in the operating parameter space and how that behavior is conveniently represented in a bifurcation diagram. This behavior is accurately captured by a generic mathematical model. We describe an analysis of the model which shows how this coupled response varies with the system and drive parameters, especially focusing on the nonlinear coupling strength between the two modes.

Paper Details

Date Published: 23 March 2020
PDF: 14 pages
Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, 1132414 (23 March 2020); doi: 10.1117/12.2551883
Show Author Affiliations
David A. Czaplewski, Argonne National Lab. (United States)
Daniel López, Argonne National Lab. (United States)
Oriel Shoshani, Ben-Gurion Univ. of the Negev (Israel)
Steven W. Shaw, Florida Institute of Technology (United States)


Published in SPIE Proceedings Vol. 11324:
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
Martha I. Sanchez; Eric M. Panning, Editor(s)

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