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Proceedings Paper

Block copolymer line roughness measurement via PSD: application to fingerprint samples
Author(s): Aurélie Le Pennec; Jérôme Rêche; Patrick Quéméré; Guido Rademaker; Romain Jarnias; Charlotte Bouet; Célia Nicolet; Christophe Navarro; Maxime Argoud; Raluca Tiron
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Paper Abstract

This paper introduces line roughness characterization non-straight patterns made of block copolymers (fingerprint patterns). Line Width Roughness have been determined using Power Spectral Density based on a special edge detection developed at CEA-LETI to extract edges contours. We investigated several process parameters impact on LWR such as the degree of polymerization of different BCPs and the impact of UV irradiation on the roughness of the PS block.

Paper Details

Date Published: 25 March 2020
PDF: 10 pages
Proc. SPIE 11326, Advances in Patterning Materials and Processes XXXVII, 113261I (25 March 2020);
Show Author Affiliations
Aurélie Le Pennec, Univ. Grenoble Alpes, CEA-LETI (France)
Jérôme Rêche, Univ. Grenoble Alpes, CEA-LETI (France)
Patrick Quéméré, Univ. Grenoble Alpes, CEA-LETI (France)
Guido Rademaker, Univ. Grenoble Alpes, CEA-LETI (France)
Romain Jarnias, Univ. Grenoble Alpes, CEA-LETI (France)
Charlotte Bouet, Univ. Grenoble Alpes, CEA-LETI (France)
Célia Nicolet, ARKEMA FRANCE, GRL (France)
Christophe Navarro, ARKEMA FRANCE, GRL (France)
Maxime Argoud, Univ. Grenoble Alpes, CEA-LETI (France)
Raluca Tiron, Univ. Grenoble Alpes, CEA-LETI (France)

Published in SPIE Proceedings Vol. 11326:
Advances in Patterning Materials and Processes XXXVII
Roel Gronheid; Daniel P. Sanders, Editor(s)

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