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Proceedings Paper

Minimization of nonlinearities in nano electrostatic drive actuators using validated coupled-field simulation
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Paper Abstract

A recently introduced new CMOS compatible actuator class, called nano electrostatic drive (NED), uses electrostatic actuation to provide significant deflections of elastic structures. The behavior of such actuators can be dominated by nonlinear phenomena, if the nonlinearities are not understood and not considered in the design. One of the main nonlinearity sources is the electrostatic actuation, which results in the well-known instability named pull-in. Additionally, due to large deflections provided by NED technology, stress stiffening and large deformation significantly influence the system, shifting the eigenfrequencies, altering the pull-in voltage, or even introducing geometrical buckling. All these effects together characterize static and dynamic behavior and can be tailored to partially counterbalance each-other by specific designs. In following, we use finite element method (FEM) to analyze the static and dynamic behavior of MEMS based on NED technology. Owing to coupled-field FEM technique, we observe effects like static pull-in, electromechanical eigenfrequency shift and transient phenomena in detail. The numerical results are validated during optical experiments, which supports the conclusions arose from the FEM. Finally, characterizing of the nonlinearities grants the ability to tailor and minimize them during the MEMS design process.

Paper Details

Date Published: 28 February 2020
PDF: 7 pages
Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930D (28 February 2020);
Show Author Affiliations
Anton Melnikov, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Hermann A. G. Schenk, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Franziska Wall, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Barbara Spitz, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Lutz Ehrig, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Sergiu Langa, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Michael Stolz, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Bert Kaiser, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Holger Conrad, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems, IPMS (Germany)
Brandenburg Univ. of Technology Cottbus-Senftenberg (Germany)


Published in SPIE Proceedings Vol. 11293:
MOEMS and Miniaturized Systems XIX
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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