Share Email Print
cover

Proceedings Paper

Super-resolution reflection-mode holographic microscope for 3d imaging of semiconductor devices without optical lens (Conference Presentation)
Author(s): Jaehyeon Son; Seung Beom Park; Kyungwon Yun; Taewan Kim; Jaehwang Jung; Myungjun Lee

Paper Abstract

We demonstrate a high resolution lens-free holographic microscopy in reflection geometry based on a pixel super resolution (SR) method. The lens-free microscopy uses a novel Michelson geometry suitable to image reflective samples with the large field of view, while the Fourier domain SR technique is applied to obtain the high resolution hologram, achieving the sub-pixel resolution of 1.2 μm in the USAF reflection target by utilizing the randomly shifted low resolution images. The proposed compact microscopy technique enables to provide high resolution amplitude and phase imaging, those are suitable for biology and semiconductor imaging applications.

Paper Details

Date Published: 9 March 2020
PDF
Proc. SPIE 11245, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVII, 1124506 (9 March 2020);
Show Author Affiliations
Jaehyeon Son, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Seung Beom Park, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Kyungwon Yun, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Taewan Kim, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Jaehwang Jung, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)
Myungjun Lee, SAMSUNG Electronics Co., Ltd. (Korea, Republic of)


Published in SPIE Proceedings Vol. 11245:
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVII
Thomas G. Brown; Tony Wilson; Laura Waller, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray