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Proceedings Paper

Design framework for high-speed 3D scanning tools and development of an axial focusing micromirror-based array
Author(s): Nathan Tessema Ersumo; Cem Yalcin; Nick Antipa; Nicolas Pégard; Laura Waller; Daniel Lopez; Rikky Muller
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Paper Abstract

Rapid 3D optical scanning of points or patterned light is widely employed across applications in microscopy, material processing, adaptive optics and surveying. Despite this broadness in applicability, embodiments of 3D scanning tools may vary considerably as a result of the specific performance needs of each application. We present here a micromirror arraybased modular framework for the systemic design of such high-speed scanning tools. Our framework combines a semicustom commercial fabrication process with a comprehensive simulation pipeline in order to optimally reconfigure pixel wiring schemes across specific applications for the efficient allocation of available degrees of freedom. As a demonstration of this framework and to address existing bottlenecks in axial focusing, we produced a 32-ring concentric micromirror array capable of performing random-access focusing for wavelengths of up to 1040 nm at a response rate of 8.75 kHz. By partitioning the rings into electrostatically driven piston-mode pixels, we are able to operate the array through simple openloop 30 V drive, minimizing insertion complexity, and to ensure stable operation by preventing torsional failure and curling from stress. Furthermore, by taking advantage of phase-wrapping and the 32 degrees of freedom afforded by the number of independently addressable rings, we achieve good axial resolvability across the tool’s operating range with an axial fullwidth- half-maximum to range ratio of 3.5% as well as the ability to address focus depth-dependent aberrations resulting from the optical system or sample under study.

Paper Details

Date Published: 28 February 2020
PDF: 9 pages
Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129303 (28 February 2020);
Show Author Affiliations
Nathan Tessema Ersumo, Univ. of California, Berkeley (United States)
Cem Yalcin, Univ. of California, Berkeley (United States)
Nick Antipa, Univ. of California, Berkeley (United States)
Nicolas Pégard, The Univ. of North Carolina at Chapel Hill (United States)
Laura Waller, Univ. of California, Berkeley (United States)
Chan Zuckerberg Biohub (United States)
Daniel Lopez, Argonne National Lab. (United States)
Rikky Muller, Univ. of California, Berkeley (United States)
Chan Zuckerberg Biohub (United States)


Published in SPIE Proceedings Vol. 11293:
MOEMS and Miniaturized Systems XIX
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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