Share Email Print
cover

Proceedings Paper

Fabrication of plasmonic slot waveguides in single-crystalline gold films and freestanding photonic metasurfaces by focused ion beam milling (Conference Presentation)
Author(s): Stefan Linden

Paper Abstract

We report on the fabrication and near field characterization of plasmonic slot waveguides in single- and poly crystalline gold films operating at telecommunication wavelengths. Moreover, we present freestanding photonic metasurfaces with a total thickness of only 40 nm prepared by focused ion beam milling of nanovoids in a carbon film followed by thermal evaporation of gold and plasma ashing of the carbon film.

Paper Details

Date Published: 10 March 2020
PDF
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129207 (10 March 2020); doi: 10.1117/12.2550461
Show Author Affiliations
Stefan Linden, Rheinische Friedrich-Wilhelms-Univ. Bonn (Germany)


Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray