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Proceedings Paper

Direct laser writing below the diffraction limit using spatially and temporally tuned ultrashort pulses
Author(s): Boyang Zhou; Aravindar Kar; MJ Soileau; Xiaoming Yu
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Paper Abstract

We report on the experimental and theoretical study of direct laser writing on dielectrics with reduced feature size by using temporally and spatially separated pulses. Features on the front surface of fused silica within the overlapping area of two laser pulses are obtained by tuning the delay time between the two pulses. The observed dependence of feature position on delays longer than the free-carrier lifetime indicates an ionization pathway initiated by self-trapped excitons. The sensitivity of feature size with the increase of laser intensity is studied by simulating the free-carrier density distribution for different temporal and spatial separation of two laser pulses. It is found that the sensitivity is influenced by the spatial and temporal separation of the two pulses.

Paper Details

Date Published: 28 February 2020
PDF: 10 pages
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129215 (28 February 2020); doi: 10.1117/12.2550450
Show Author Affiliations
Boyang Zhou, Univ. of Central Florida (United States)
Aravindar Kar, Univ. of Central Florida (United States)
MJ Soileau, Univ. of Central Florida (United States)
Xiaoming Yu, Univ. of Central Florida (United States)


Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)

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