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Proceedings Paper

A novel 3D traceable optical beam detection system designed for probe-scanning metrological AFM
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Paper Abstract

Metrological AFM (mAFM) has high-resolution three-dimensional measurement capability, and its measurement results can be traced back to the SI. Most of mAFMs utilize the optical beam deflection (OBD) method to detect the deflection of cantilever probe, which has simple structure and high sensitivity. A novel 3D traceable OBD system was designed based on the flatbed scanner. In the design, the propagation direction of the laser beam can always be parallel to the motion direction of the scanner so that the relative positions of the laser focal spot and the cantilever probe remain unchanged in any scanning range. All the scanners in the X, Y, Z directions are connected in series, and their motion directions are strictly orthogonal without mutual coupling. The application of the compensation scanner achieves the synchronous movement of the aspherical lens and the Z-direction scanner, which avoids the defocusing phenomenon of the cantilever probe during the large-stroke scanning with the Z-direction scanner. A series of experiments were performed to evaluate the proposed design, including the measurement of the laser tracking errors caused by the scanner motion and imaging results of a standard grid under contact mode. The results demonstrated the imaging capabilities of this system.

Paper Details

Date Published: 12 March 2020
PDF: 8 pages
Proc. SPIE 11434, 2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 114341K (12 March 2020); doi: 10.1117/12.2550292
Show Author Affiliations
Shasha Xiao, Tianjin Univ. (China)
Nianhang Lu, Tianjin Univ. (China)
Rui Zhang, Tianjin Univ. (China)
Sen Wu, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 11434:
2019 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Juan Liu; Baohua Jia; Xincheng Yao; Yongtian Wang; Takanori Nomura, Editor(s)

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