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Proceedings Paper

Transparent conductive oxides for integrated photonics and silicon photonics (Conference Presentation)
Author(s): Alan X. Wang

Paper Abstract

Transparent conductive oxides (TCOs) have attracted significant research interests for integrated photonics and silicon photonics due to their dramatic change of optical permittivity, which can be dynamically controlled by the gate voltage. In addition, TCO materials can be easily integrated with silicon photonic devices by sputtering and regular lithography process, which demonstrates great potentials for large-scale integration. We report our recent research progress of hybrid silicon-TCO photonic devices using TCO gate/high-K insulator (HfO2)/Si waveguides, which achieves both outstanding energy efficiency and high modulation bandwidth. The strategy for future on-chip optical interconnect systems will also be discussed in this presentation.

Paper Details

Date Published: 10 March 2020
Proc. SPIE 11281, Oxide-based Materials and Devices XI, 1128117 (10 March 2020); doi: 10.1117/12.2549396
Show Author Affiliations
Alan X. Wang, Oregon State Univ. (United States)

Published in SPIE Proceedings Vol. 11281:
Oxide-based Materials and Devices XI
David J. Rogers; David C. Look; Ferechteh H. Teherani, Editor(s)

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