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Proceedings Paper

Research on surface extension process technology for restraining edge effect in CNC polishing
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Paper Abstract

Aiming at the improvement of edge effect in CNC polishing. A new polishing method based on the surface extension is proposed. The basic idea and workflow are presented. The availability of this method is verified by simulation. Experimental study was carried out on 420mm×420mm caliber fused quartz optical element. The experimental results show that this method can restrain the collapse and warped edge surface. PV less than λ/3,GRMS less than 7.7nm/cm and PSD1 less than 1.8nm can be obtained combining the small scale smoothing technology.

Paper Details

Date Published: 31 January 2020
PDF: 6 pages
Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 114270C (31 January 2020); doi: 10.1117/12.2549169
Show Author Affiliations
Jinyong Huang, Chengdu Fine Optical Engineering Research Ctr. (China)
Qing Hu II, Chengdu Fine Optical Engineering Research Ctr. (China)
Lei Xie III, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma IV, Chengdu Fine Optical Engineering Research Ctr. (China)
Dingyao Yan V, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 11427:
Second Target Recognition and Artificial Intelligence Summit Forum
Tianran Wang; Tianyou Chai; Huitao Fan; Qifeng Yu, Editor(s)

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