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Study on mechanical structures for large flat applied to large-aperture interferometer
Author(s): Jingyu Pan; Shijie Liu; You Zhou; Qi Lu; Wenchao Ji
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Paper Abstract

The deformation of the φ600mm reference mirror under gravity cannot be ignored when measuring optical components with a φ600mm interferometer. Therefore, it is necessary to choose a reasonable support and rotation mechanism to adjust the reference mirror of the interferometer in order to meet the accuracy requirements. In this paper, two mechanical structures for supporting and rotating the φ600mm reference mirror are analyzed. One is using the roller slings to provide tension, and the conveyor belt drives the reference mirror to rotate by friction; while the other one is using glue to connect the silica gel and the edge of the reference mirror where silica gel is fixed on the metal frame. The rotation of the reference mirror can be realized by manually rotating the frame. In order to analyze the influence of the two mechanisms on the mirror under working conditions, a three-dimensional model of the φ600mm reference mirror with its supporting system was established using the finite element analysis software ABAQUS, and the contact conditions and boundary conditions were reasonably applied to the reference mirror. Reference mirror is analyzed in both statical and dynamical states. The changes of internal stress and surface shape are compared when the reference mirror is supported and rotated on both mechanisms. The advantages of different mechanisms are elaborated, and the parameters of mechanisms are optimized theoretically. Analysis results can provide a useful guide for the support of the reference mirror and the adjustment of the φ600mm large aperture interferometer.

Paper Details

Date Published: 20 December 2019
PDF: 5 pages
Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 1120931 (20 December 2019); doi: 10.1117/12.2548779
Show Author Affiliations
Jingyu Pan, Shanghai Institute of Optics and Fine Mechanics (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
You Zhou, Shanghai Institute of Optics and Fine Mechanics (China)
Qi Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Wenchao Ji, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 11209:
Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
Hannan Wang, Editor(s)

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