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Proceedings Paper

Thermoelastic damping suppression method for MEMS resonant beam by introducing vertical slots
Author(s): Rongjun Cheng; Yuhai Qi; Pengcheng Song; Qiangxian Huang; Liansheng Zhang
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Paper Abstract

Thermoelastic damping is one of the key factors affecting the quality factor of vacuum-encapsulated resonant devices. In order to suppress the influence of thermoelastic damping, vertical slots are introduced to the MEMS resonant beams. The heat flux inside the beams are expected to be reduced through local structural optimization, thus improving the quality factor. To verify the feasibility of the proposed method, the software of COMSOL is employed to explore the inhibition effect of structural parameters such as length, width and quantity of the slots on thermoelastic damping. The simulation results show that the thermoelastic damping decreases sharply and the quality factor are improved after the slots are introduced, and the effects are strongly related to the characteristic parameters of the slots.

Paper Details

Date Published: 13 November 2019
PDF: 5 pages
Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113430S (13 November 2019); doi: 10.1117/12.2548432
Show Author Affiliations
Rongjun Cheng, Hefei Univ. of Technology (China)
Yuhai Qi, Hefei Univ. of Technology (China)
Pengcheng Song, Hefei Univ. of Technology (China)
Qiangxian Huang, Hefei Univ. of Technology (China)
Liansheng Zhang, Hefei Univ. of Technology (China)

Published in SPIE Proceedings Vol. 11343:
Ninth International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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