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Proceedings Paper

Design and fabrication of nanostructure for mid-IR antireflection surface texturing applications
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Paper Abstract

Reduction of unwanted light reflection from a surface of a substance is very essential for the improvement of the performance of optical and photonic devices. Anti-reflection (AR) surface textures can be created on the surface of lenses and other optical elements to reduce the intensity of surface reflections. AR textures are indispensable in numerous applications, both low and high power, and are increasingly demanded on highly curved optical components.

Nanofabrication involves the fabrication of devices at the nanometer scale. In this work, we used nanofabrication to design and fabricate nanostructures of squares and hexagons of different spatial pitch and gap width in Gallium Arsenide (GaAs). These structures have a gap of 300nm, 400nm, and pitch of 900nm, 1000nm and 1100nm. The fabrication process involves solvent cleaning, deposition of silicon oxide, soft and hard bake, photolithography and development. Both wet and dry etching were used to fabricate the expected structures. Results from scanning electron microscopy (SEM) to examine the shapes of the fabricated arrays are presented in this study. By combining dry and wet etches, we obtained the desired shapes and depth of hexagons and squares with rounded edges. We report detailed fabrication processes and their corresponding results at each step.

Paper Details

Date Published: 28 February 2020
PDF: 9 pages
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 112921F (28 February 2020); doi: 10.1117/12.2548392
Show Author Affiliations
Rachit M. Sood, Univ. of Maryland, Baltimore County (United States)
Fatima Nafisa, Univ. of Maryland, Baltimore County (United States)
Douglas Bamford, Physical Sciences Inc. (United States)
David Woolf, Physical Sciences Inc. (United States)
Joel Hensley, Physical Sciences Inc. (United States)
Narsingh Singh, Univ. of Maryland, Baltimore County (United States)
Fow-Sen Choa, Univ. of Maryland, Baltimore County (United States)

Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)

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