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Inverse optimization for designing wide angle diffractive optical element
Author(s): Guowei Zhang; Qiang Song Sr.; Lixin Wei; Xiaodong Yin
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Paper Abstract

The most frequently-used design method for diffractive optical elements (DOE) is scalar diffraction theory, but it is unsuitable for the design of sub-wavelength DOE with large diffraction angles. In this paper, we propose a hybrid iterative design method, which effectively utilizes the large-scale global optimization characteristics of scalar diffraction theory and the accuracy of the rigorous coupled wave analysis (RCWA) theory. A 5*7 beam splitter was designed to verify the proposed model. The design resolution is around 200nm with diffraction angle at 55.61°x61.82°. Several initial solutions were obtained by the non-paraxial scalar diffraction theory. Those solutions were later used as the inputs for continuous optimization through the Genetic Algorithm (GA). The RCWA model was used to analyze the diffraction efficiency and uniformity of the beam splitter DOE. All these structures were fabricated by lithography and duplicated by nano-imprinting process. The optical uniformity of 5*7 beam splitter pattern is improved to 46.30% from its initial values which is bigger than 70%. The testing data from RCWA optimized pattern matches with the design value from scatter plot analysis. This provides an effective method for the design of sub-wavelength DOE with large diffraction angle.

Paper Details

Date Published: 20 December 2019
PDF: 8 pages
Proc. SPIE 11209, Eleventh International Conference on Information Optics and Photonics (CIOP 2019), 112092G (20 December 2019); doi: 10.1117/12.2548299
Show Author Affiliations
Guowei Zhang, Xi’an Jiaotong Univ. (China)
Beijing Yuguang Technology Development Co., Ltd. (China)
Qiang Song Sr., Beijing Yuguang Technology Development Co., Ltd. (China)
Lixin Wei, Beijing Yuguang Technology Development Co., Ltd. (China)
Xiaodong Yin, Beijing Yuguang Technology Development Co., Ltd. (China)


Published in SPIE Proceedings Vol. 11209:
Eleventh International Conference on Information Optics and Photonics (CIOP 2019)
Hannan Wang, Editor(s)

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