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Proceedings Paper

High-resolution biopatterning with beam pen lithography (Conference Presentation)

Paper Abstract

We demonstrate high-throughput, maskless patterning of biomolecules over centimeter scale areas with a diffraction-unlimited, sub-0.5 µm resolution using beam pen lithography (BPL), a technique employing a massively parallel array of near-field scanning probes. By integrating a digital micromirror device into the light path and aligning the grid of micromirrors to the grid of probes, we achieve independent actuation of >50,000 probes, enabling arbitrary patterning with high uniformity over the entire projection area.

Paper Details

Date Published: 10 March 2020
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Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129406 (10 March 2020); doi: 10.1117/12.2547938
Show Author Affiliations
Andrey Ivankin, TERA-print, LLC (United States)
Jared Magoline, TERA-print, LLC (United States)
Shaowei Ding, TERA-print, LLC (United States)
William Hutson, TERA-print, LLC (United States)


Published in SPIE Proceedings Vol. 11294:
Emerging Digital Micromirror Device Based Systems and Applications XII
John Ehmke; Benjamin L. Lee, Editor(s)

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