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Proceedings Paper

High-performance eddy current displacement sensor for adaptive optical systems
Author(s): Chengliang Pan; Fei Yang; Heng Zuo; Zhihua Feng
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Paper Abstract

Adaptive optical systems are originally developed for the field of astronomy to eliminate image blurring aberrations induced by atmospheric disturbance. In some complex applications, such as the contactless thin adaptive mirror for large-aperture ground-based optical telescopes, displacement sensors are needed to measure the deformation of the deformable mirror and construct a local position control loop. In the past adaptive secondary mirrors, capacitive sensors are designed to measure the mirror deformation. However, they suffer problems of manufacturing, maintenance, and environment. In this paper, a high-performance eddy current displacement sensor is proposed for the deformation measurement of adaptive secondary mirrors. Simulation and optimization of the detecting coil and conductive target are carried out. A deliberate signal processing circuit is designed for weak signal detection. Experimental results of the prototype sensor indicate a resolution up to 5 nm and a linearity better than 0.1% within the measuring range of 50 μm and bandwidth of 3 kHz, which meet the basic technical requirements of the adaptive optical systems.

Paper Details

Date Published: 13 November 2019
PDF: 5 pages
Proc. SPIE 11343, Ninth International Symposium on Precision Mechanical Measurements, 113430F (13 November 2019); doi: 10.1117/12.2547421
Show Author Affiliations
Chengliang Pan, Hefei Univ. of Technology (China)
Fei Yang, Hefei Univ. of Technology (China)
Heng Zuo, Nanjing Institute of Astronomical Optics and Technology (China)
Zhihua Feng, Univ. of Science and Technology of China (China)

Published in SPIE Proceedings Vol. 11343:
Ninth International Symposium on Precision Mechanical Measurements
Liandong Yu, Editor(s)

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