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Proceedings Paper

Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses
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Paper Abstract

We present a new fabrication method to realize smooth structures in lithium niobate. Therefore a detailed study on laser micro-polishing using ultrashort laser pulses is carried out by separating the effects of spatial pulse overlap and temporal pulse overlap. The adventage of this approach is the smoothing of the processed area by a simultaneous ablation. That will allow ablation depths between 1 µm and 4 µm with rms-roughness values of ≈20 nm.

Paper Details

Date Published: 2 March 2020
PDF: 7 pages
Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112680R (2 March 2020); doi: 10.1117/12.2546493
Show Author Affiliations
Mareike Schäfer, Photonik-Zentrum Kaiserslautern e.V. (Germany)
Research Ctr. Optimas (Germany)
Johannes L'huillier, Photonik-Zentrum Kaiserslautern e.V. (Germany)
Research Ctr. Optimas (Germany)

Published in SPIE Proceedings Vol. 11268:
Laser-based Micro- and Nanoprocessing XIV
Udo Klotzbach; Akira Watanabe; Rainer Kling, Editor(s)

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