Share Email Print
cover

Proceedings Paper

Position observer based galvanometer scanner and XY stage synchronization for large area processing
Author(s): Keith J. Dowling; Bhavesh A. Bhut; Mark S. Lucas; Seethram Sivam; Yu John Hsu; Amit Shahar; Jin Li
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In this paper we present a novel sub-system for synchronizing motion of the galvanometer-based scanner and the XY stage system using a compact single controller that is independent of XY stage type or manufacturer. This integration directly utilizes the stage’s encoder output to compensate its motion in real time. Better than 10μm accuracy is demonstrated with various application patterns.

Paper Details

Date Published: 2 March 2020
PDF: 9 pages
Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 1126713 (2 March 2020); doi: 10.1117/12.2546482
Show Author Affiliations
Keith J. Dowling, Cambridge Technology, A Novanta Co. (United States)
Bhavesh A. Bhut, Cambridge Technology, A Novanta Co. (United States)
Mark S. Lucas, Cambridge Technology, A Novanta Co. (United States)
Seethram Sivam, Cambridge Technology, A Novanta Co. (United States)
Yu John Hsu, Cambridge Technology, A Novanta Co. (United States)
Amit Shahar, Cambridge Technology, A Novanta Co. (United States)
Jin Li, Cambridge Technology, A Novanta Co. (United States)


Published in SPIE Proceedings Vol. 11267:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
Gediminas Račiukaitis; Carlos Molpeceres; Jie Qiao; Aiko Narazaki, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray