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Proceedings Paper

Suspended InGaAs membrane waveguide devices with subwavelength gratings and photonic crystal structures for ammonia sensing at lambda=6.15um (Conference Presentation)
Author(s): Kyoung Min Yoo; Jason Midkiff; Ali Rostamian; Hamed Dalir; Ray T. Chen

Paper Abstract

Fully suspended InGaAs waveguide devices with holey photonic crystal waveguides (HPCWs) and Sub-wavelength waveguides (SWWs) are designed and fabricated for mid-infrared sensing at λ=6.15µm in the low index contrast InGaAs-InP platform. We experimentally detect 5 ppm ammonia in 1 mm long suspended HPCW and 3 mm long suspended SWW with propagation loss of 39.1 dB/cm and 4.1 dB/cm, respectively. This result emphasizes the advantage of SWWs which can utilize the longer devices by virtue of its low propagation loss to increase the gas sensing sensitivity compare to HPCWs.

Paper Details

Date Published: 10 March 2020
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Proc. SPIE 11276, Optical Components and Materials XVII, 1127610 (10 March 2020); doi: 10.1117/12.2546430
Show Author Affiliations
Kyoung Min Yoo, The Univ. of Texas at Austin (United States)
Jason Midkiff, The Univ. of Texas at Austin (United States)
Ali Rostamian, The Univ. of Texas at Austin (United States)
Hamed Dalir, Omega Optics, Inc. (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 11276:
Optical Components and Materials XVII
Shibin Jiang; Michel J. F. Digonnet, Editor(s)

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