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Proceedings Paper

Long travel tip, tilt, z-stage (Conference Presentation)
Author(s): Leonid Skigin; Roman Yasinov; Gal Peled; Alan Feinstein; Nir Karasikov

Paper Abstract

Tip, Tilt, Z mechanisms are required in a diversity of applications including Semicon and Life-Science. A challenge is to realize a long travel design. Using Ultra Sonic Piezo motors, two long travel designs are demonstrated and analyzed. The challenges of achieving high stiffness and fast response are discussed. Accuracies in the nanometer linearly or micro radian angularly are attained. The stage design is modular and robust. Both vacuum and ambient pressure versions could be implemented. Experimental results are presented on positioning and scanning. The mechanism benefits further from previously developed capabilities with these motors: Vibration suppression by the motor itself, zero drift and fast response.

Paper Details

Date Published: 9 March 2020
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112870T (9 March 2020); doi: 10.1117/12.2546347
Show Author Affiliations
Leonid Skigin, Nanomotion Ltd. (Israel)
Roman Yasinov, Nanomotion Ltd. (Israel)
Gal Peled, Nanomotion Ltd. (Israel)
Alan Feinstein, Nanomotion Inc. (United States)
Nir Karasikov, Nanomotion Ltd. (Israel)

Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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