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Proceedings Paper

Novel piezo motor for a high precision motion axis
Author(s): Roman Yasinov; Gal Peled; Alan Feinstein; Nir Karasikov
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Paper Abstract

The Semiconductor industry’s evolution towards 7, 5 and 3 nm nodes at higher throughputs, poses a challenge on motion systems. Motion systems are expected to yield a sub nanometer accuracy and velocity higher than 500 mm/sec, fast move and settle, low drift and minimal thermal load on the system, especially in vacuum. Ultrasonic piezo-motors have many benefits to fulfill these requirements. This paper reports on the development of a novel piezo motor, characterized by high velocity, high stiffness, low thermal load and ultra-high precision. The use of six motors, in parallel, on a single motion axis can yield a 200N of thrust force and a 60 N/μm stiffness. The motor is driven by a new driver having a noise equivalent position of better than 60 pico-meter. This paper reviews the motor design considerations, performance capabilities in stiffness, duty cycle, sub-nanometer convergence and ultra-low drift. Robustness is demonstrated by long term run. An example of a motion axis driven by the novel motor is shown.

Paper Details

Date Published: 2 March 2020
PDF: 11 pages
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112870S (2 March 2020); doi: 10.1117/12.2546283
Show Author Affiliations
Roman Yasinov, Nanomotion Inc. (United States)
Gal Peled, Nanomotion Inc. (United States)
Alan Feinstein, Nanomotion Inc. (United States)
Nir Karasikov, Nanomotion Inc. (United States)

Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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