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Proceedings Paper

Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR
Author(s): Fabian Schwarz; Frank Senger; Jörg Albers; Pauline Malaurie; Christian Janicke; Leon Pohl; Felix Heinrich; Dirk Kaden; Hans-Joachim Quenzer; Fabian Lofink; Andreas Bahr; Thomas von Wantoch; Ulrich Hofmann
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Paper Abstract

Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.

Paper Details

Date Published: 28 February 2020
PDF: 17 pages
Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129309 (28 February 2020); doi: 10.1117/12.2546035
Show Author Affiliations
Fabian Schwarz, OQmented GmbH (Germany)
Frank Senger, Fraunhofer ISIT (Germany)
Jörg Albers, Fraunhofer ISIT (Germany)
Pauline Malaurie, Fraunhofer ISIT (Germany)
Christian Janicke, OQmented GmbH (Germany)
Leon Pohl, OQmented GmbH (Germany)
Felix Heinrich, Fraunhofer ISIT (Germany)
Dirk Kaden, Fraunhofer ISIT (Germany)
Hans-Joachim Quenzer, Fraunhofer ISIT (Germany)
Fabian Lofink, Fraunhofer ISIT (Germany)
Andreas Bahr, Christian Albrechts Univ. Kiel (Germany)
Thomas von Wantoch, OQmented GmbH (Germany)
Ulrich Hofmann, OQmented GmbH (Germany)


Published in SPIE Proceedings Vol. 11293:
MOEMS and Miniaturized Systems XIX
Wibool Piyawattanametha; Yong-Hwa Park; Hans Zappe, Editor(s)

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