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Proceedings Paper

Inner wall roughness of microchannel-plate-based x-ray optics in etching process
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Paper Abstract

Microchannel-plate-based x-ray optics is designed based on the principle that the lobster eye reflects rather than refracts the object. In practice, the inner wall of the square channel is not absolutely smooth but a bit rough, which causes diffuse scattering of X-rays, resulting in an exponential decline in reflectivity. In the present work, we investigated the morphology of channel inner wall in the etching process and the diffusion depth of the elements at the interface between channel and wall. The diffusion layer is a network-like structure, with the thickness of more than 1μm. As the acid-etching continues, the elements of the channel material in the network are gradually dissolved, and the remaining channel wall materials become the skeleton. After a long time of etching, the inner wall surface is columnar and the roughness is gradually increased. This study provides some guidelines for the preparation of ultra-smooth reflective surfaces.

Paper Details

Date Published: 18 December 2019
PDF: 6 pages
Proc. SPIE 11338, AOPC 2019: Optical Sensing and Imaging Technology, 1133820 (18 December 2019); doi: 10.1117/12.2545763
Show Author Affiliations
Jiao Lian, China Building Materials Academy (China)
Xian Zhang, China Building Materials Academy (China)
Yong Sun, China Building Materials Academy (China)
Tiezhu Bo, China Building Materials Academy (China)
Xiaoxuan Shi, China Building Materials Academy (China)
Hua Cai, China Building Materials Academy (China)
Chang Liu, China Building Materials Academy (China)
Hui Liu, China Building Materials Academy (China)

Published in SPIE Proceedings Vol. 11338:
AOPC 2019: Optical Sensing and Imaging Technology
John E. Greivenkamp; Jun Tanida; Yadong Jiang; HaiMei Gong; Jin Lu; Dong Liu, Editor(s)

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