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Proceedings Paper

An electric measuring equipment integrated with an automatic optical registration and a chamber-based gas supply system for wafer-based gas sensors
Author(s): Ming-Fu Chen; Yi-Hao Lin; Chih-Wen Chen; Po-Jui Chen; Yu-Hsin Lin; Wen-Hao Cho; Jian-Lin Chen
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Paper Abstract

An innovative system structure was proposed including a linear probes device, an automatic optical registration system, a chamber-based gas supply system, a chuck table integrated with a heating device to efficiently evaluate the quality of sensors chips. The chamber-based gas supply system provided required gas concentration at the probing region. A chuck table integrated with a heating device to provide required uniform temperature was integrated to motion stage platform. An AOR system was implemented for registration of wafer automatically and adjustment of a linear probes device. Developed equipment had several advantages:(1) Registration process of wafer could be completed automatically within 50 seconds; (2) Required gas concentration could be quickly achieved within 60 seconds at testing region to save a lot of time and gas consumption; (3) Measurement could be finished within 30 minutes for a 6”-wafer with chip size of 1x1 mm under the condition of 10 chips probed for each time. The measuring efficiency was at least up to 10 times greater than the one of testing one by one for packaged sensors.

Paper Details

Date Published: 2 March 2020
PDF: 6 pages
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112871E (2 March 2020); doi: 10.1117/12.2545503
Show Author Affiliations
Ming-Fu Chen, Taiwan Instrument Research Institute (Taiwan)
Yi-Hao Lin, Taiwan Instrument Research Institute (Taiwan)
Chih-Wen Chen, Taiwan Instrument Research Institute (Taiwan)
Po-Jui Chen, Taiwan Instrument Research Institute (Taiwan)
Yu-Hsin Lin, Taiwan Instrument Research Institute (Taiwan)
Wen-Hao Cho, Taiwan Instrument Research Institute (Taiwan)
Jian-Lin Chen, Taiwan Instrument Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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