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Proceedings Paper

All-optical ultrasound sensing in photonic crystal slabs aided by PMMA (Conference Presentation)
Author(s): Eric Y. Zhu; Maria C. Charles; Cory Rewcastle; Raanan Gad; Li Qian; Ofer Levi

Paper Abstract

Silicon photonics-based photonic crystal slab (PCS) ultrasound sensors have recently been demonstrated to have properties such as broadband (1-40 MHz) detection and sub-kPa sensitivities. Here, we study the effect of a thin PMMA overlayer (~ 300 nm) on the sensitivity of a PCS sensor. The presence of this overlayer can result in almost 50% of the electric field energy of the PCS guided resonance to reside outside of the slab. This allows for the PCS to be sensitized to multiple mechanisms, including photoelastic change and mechanical deformation of the overlayer, for ultrasonic detection. These mechanisms are investigated in this work.

Paper Details

Date Published: 20 April 2020
Proc. SPIE 11240, Photons Plus Ultrasound: Imaging and Sensing 2020, 1124012 (20 April 2020); doi: 10.1117/12.2545146
Show Author Affiliations
Eric Y. Zhu, Univ. of Toronto (Canada)
Maria C. Charles, Univ. of Toronto (Canada)
Cory Rewcastle, Univ. of Toronto (Canada)
Raanan Gad, Univ. of Toronto (Canada)
Li Qian, Univ. of Toronto (Canada)
Ofer Levi, Univ. of Toronto (Canada)

Published in SPIE Proceedings Vol. 11240:
Photons Plus Ultrasound: Imaging and Sensing 2020
Alexander A. Oraevsky; Lihong V. Wang, Editor(s)

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