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Proceedings Paper

Optofluidics in alumino-borosilicate glass by femtosecond laser micromachining (Conference Presentation)
Author(s): Andrea Crespi; Francesca Bragheri; Roberto Osellame

Paper Abstract

Femtosecond laser irradiation followed by chemical etching (FLICE), combined with femtosecond-laser waveguide writing, has allowed to demonstrate, in the past years, a variety of compact optofluidic devices in fused silica substrate. Applications are diverse and range from biochemical sensing to single-cell manipulation. On the other hand, femtosecond-laser written circuits with high complexity, and waveguides with very low insertion loss, have been reported in Eagle alumino-borosilicate glass (Corning). Here we show that FLICE can be applied to produce buried microchannels also in EagleXG substrate. Our results will enable quick fabrication of microfluidic devices, directly interfaced with complex and low-loss photonic circuits.

Paper Details

Date Published: 9 March 2020
Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112680M (9 March 2020); doi: 10.1117/12.2545117
Show Author Affiliations
Andrea Crespi, Politecnico di Milano (Italy)
Consiglio Nazionale delle Ricerche (Italy)
Francesca Bragheri, Consiglio Nazionale delle Ricerche (Italy)
Roberto Osellame, Consiglio Nazionale delle Ricerche (Italy)
Politecnico di Milano (Italy)

Published in SPIE Proceedings Vol. 11268:
Laser-based Micro- and Nanoprocessing XIV
Udo Klotzbach; Akira Watanabe; Rainer Kling, Editor(s)

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