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Proceedings Paper

Off-axis catadioptric partial compensator design for interferometric measurement of optical freeform surface
Author(s): Xu Chang; Lihua Lu; Yao Hu; Qun Hao
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Paper Abstract

Optical freeform surfaces have been widely used in optical systems owing to their design degrees of freedom, which can simplify the structure and improve the performance of optical systems. High accuracy testing for freeform surface is needed due to the improvement of machining accuracy. However, it is still a challenge to achieve high measuring accuracy because freeform surfaces lack rotational symmetry. In this paper, an off-axis catadioptric partial compensator (OACPC) design for non-null interferometric method is proposed to measure freeform surface. The design of OACPC consists of two parts: constructing initial structure and optimizing. The initial structure is obtained by the vector aberration theory and PW method. Based on the initial structure, the OACPC is generated by modelling and optimizing in the optical design software. In order to verify the feasibility, universality and effectiveness, a design example is given. Theoretical analysis and simulation results demonstrate that the design can realize the measurement of freeform surfaces.

Paper Details

Date Published: 12 March 2020
PDF: 9 pages
Proc. SPIE 11439, 2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 1143913 (12 March 2020); doi: 10.1117/12.2544791
Show Author Affiliations
Xu Chang, Beijing Institute of Technology (China)
Lihua Lu, Beijing Institute of Technology (China)
Yao Hu, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 11439:
2019 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Jigui Zhu; Kexin Xu; Hai Xiao; Sen Han, Editor(s)

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