Accurate optical modeling for design and optimization of liquid crystal on silicon spatial light modulators (LCoS SLMs) is important for phase-related applications. Traditional matrix method cannot accurately predict the optical performance when the LC distribution is complex, therefore the rigorous finite element method (FEM) is preferred. However, the optical modeling of LCoS is a multidimensional problem, which is difficult to simulate with FEM. Here, we present the development of an improved FEM by combining the scattering matrix method with the domain decomposition method to reduce the computational burden for optical simulation of LCoS. Furthermore, a 2D simulation example with phase grating displayed on LCoS is presented and compared with experiment.

Date Published: 25 February 2020
PDF: 8 pages
Proc. SPIE 11303, Emerging Liquid Crystal Technologies XV, 1130308 (25 February 2020); doi: 10.1117/12.2544783

Published in SPIE Proceedings Vol. 11303:
Emerging Liquid Crystal Technologies XV
Liang-Chy Chien; Dirk J. Broer, Editor(s)