Share Email Print
cover

Proceedings Paper

[beta]-(AlGa)2O3 solar-blind photodetector fabricated by high-temperature driven interdiffusion method (Conference Presentation)
Author(s): Che-Hao Liao; Yara Banda; Gaia Da Prato; Kuang-Hui Li; Xiaohang Li

Paper Abstract

A novel method to fabricate β-(AlGa)2O3 solar-blind photodetector has been demonstrated. The β-Ga2O3 thin film was first deposited on c-plane sapphire substrate by pulsed laser deposition (PLD) and following by high-temperature annealing (1000°C and above). With a proper annealing condition, the PLD deposited β-Ga2O3 film could be transformed from a binary to become a ternary β-(AlGa)2O3 film, which is resulted from the Al atoms of sapphire substrate diffused into the PLD deposited β-Ga2O3 layer by high-temperature driven, and the Ga atoms from β-Ga2O3 thin film to the substrate diffusion as well. By high-temperature driven interdiffusion method, β-(AlGa)2O3 thin film with designed Al composition and film thickness could be achieved, which could cover higher bandgap larger than 4.9 eV. With such a method, one can achieve β-(AlGa)2O3 Solar-blind photodetector with good crystal quality and surface morphology, which also could push the response wavelength even further to the DUV range.

Paper Details

Date Published: 10 March 2020
PDF
Proc. SPIE 11281, Oxide-based Materials and Devices XI, 112810P (10 March 2020); doi: 10.1117/12.2544676
Show Author Affiliations
Che-Hao Liao, King Abdullah Univ. of Science and Technology (Saudi Arabia)
Yara Banda, King Abdullah Univ. of Science and Technology (Saudi Arabia)
Gaia Da Prato, King Abdullah Univ. of Science and Technology (Saudi Arabia)
Kuang-Hui Li, King Abdullah Univ. of Science and Technology (Saudi Arabia)
Xiaohang Li, King Abdullah Univ. of Science and Technology (Saudi Arabia)


Published in SPIE Proceedings Vol. 11281:
Oxide-based Materials and Devices XI
David J. Rogers; David C. Look; Ferechteh H. Teherani, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray