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Proceedings Paper

Precision interferometric measurement of optical flat using wavelength tuning Fizeau interferometer
Author(s): Yangjin Kim; Jiwon Seo; Sungtae Kim; Wonjun Bae; Mamoru Mitsuishi
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Paper Abstract

Wavelength-tuning interferometry has been widely used for measuring the thickness variation of optical devices used in the semiconductor industry. However, in wavelength-tuning interferometry, the nonlinearity of phase shift causes a spatially uniform error in the calculated phase distribution. In this study, the spatially uniform error is formulated using Taylor series. A new 9-sample phase-shifting algorithm is proposed, with which the uniform spatial phase error can be eliminated. Finally, optical-thickness variation of transparent plate is measured using the proposed algorithm and wavelength-tuning Fizeau interferometer.

Paper Details

Date Published: 2 March 2020
PDF: 6 pages
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112871D (2 March 2020); doi: 10.1117/12.2544324
Show Author Affiliations
Yangjin Kim, Pusan National Univ. (Korea, Republic of)
Jiwon Seo, Pusan National Univ. (Korea, Republic of)
Sungtae Kim, Pusan National Univ. (Korea, Republic of)
Wonjun Bae, Pusan National Univ. (Korea, Republic of)
Mamoru Mitsuishi, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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