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Proceedings Paper

Amorphous silicon waveguide escalator: monolithic integration of active components on 3-um SOI platform
Author(s): Arijit Bera; Matteo Cherchi; Kirsi Tappura; Päivi Heimala; Timo Aalto
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Paper Abstract

VTT’s 3 μm SOI platform with record low propagation loss (0.1 dB/cm for fundamental mode), as well as polarization insensitivity, offers a rich portfolio of efficient passive and active components. With a view to extend the component toolbox by monolithically integrating high-speed plasmonic modulators, we have developed an a-Si:H based waveguide escalator to take out light from highly confined thick-SOI passives to the top layer where active materials are monolithically integrated. Using the compact escalator, monolithic integration of various high-speed active components on the 3 μm SOI platform are proposed.

Paper Details

Date Published: 26 February 2020
PDF: 9 pages
Proc. SPIE 11285, Silicon Photonics XV, 1128507 (26 February 2020); doi: 10.1117/12.2544311
Show Author Affiliations
Arijit Bera, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Matteo Cherchi, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Kirsi Tappura, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Päivi Heimala, VTT Technical Research Ctr. of Finland Ltd. (Finland)
Timo Aalto, VTT Technical Research Ctr. of Finland Ltd. (Finland)

Published in SPIE Proceedings Vol. 11285:
Silicon Photonics XV
Graham T. Reed; Andrew P. Knights, Editor(s)

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