In this talk we will present results on stimuli-responsive reversible deformations in polymeric microstructures fabricated using direct laser writing in pre-polymers (DLW-PP) technique. This microstructure behavior can be employed for micro-actuation applications in MEMS as well as designing new passive chemical sensors for microfluidic applications via hybrid (additive-subtractive) microfabrication technique. In this talk we will present our recent results in this field introducing few new concepts: a novel all-optical readout chemical sensor suitable for microfluidic applications, micromechanical components acting as flow control mechanisms based on bi-polymeric structures and solvent-sensitive micromechanical plug for microchannels.

Date Published: 10 March 2020
PDF
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 112920U (10 March 2020); doi: 10.1117/12.2544260

Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)