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Proceedings Paper

Millimeter-sized particle sensor using a wide field of view monolithic lens assembly for light scattering analysis in Fourier domain
Author(s): Gabriel Jobert; Maryse Fournier; Salim Boutami; Cécile Jamois; Andrea Lovera; Daniele Braga; Christian Seassal
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Paper Abstract

We present our latest advances in the field of miniature optical particulate matter sensors. By illuminating a single particle in an air channel, one can record the light scattering signature with a CMOS image sensor and then classify particles. This signature is optically pre-processed with an advanced, millimeter-sized, monolithic, refracto-reflective optical system. It performs notably a Fourier transform with very wide field of view of scattering angles, and includes as well integrated fluidics and alignment. Functional prototypes were fabricated using laser micro machining on glass, selective polishing, and were replicated with epoxy resin using a molding process.

Paper Details

Date Published: 2 March 2020
PDF: 11 pages
Proc. SPIE 11287, Photonic Instrumentation Engineering VII, 112870O (2 March 2020); doi: 10.1117/12.2544185
Show Author Affiliations
Gabriel Jobert, Univ. Grenoble-Alpes, CEA-LETI Minatec (France)
Institut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Univ. de Lyon (France)
Maryse Fournier, Univ. Grenoble-Alpes, CEA-LETI Minatec (France)
Salim Boutami, Univ. Grenoble-Alpes, CEA-LETI Minatec (France)
Cécile Jamois, Institut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Univ. de Lyon (France)
Andrea Lovera, FEMTOprint (Switzerland)
Daniele Braga, FEMTOprint (Switzerland)
Christian Seassal, Institut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Univ. de Lyon (France)


Published in SPIE Proceedings Vol. 11287:
Photonic Instrumentation Engineering VII
Yakov Soskind; Lynda E. Busse, Editor(s)

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