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Proceedings Paper

Challenges and opportunities of MOVPE and THVPE/HVPE for nitride light emitting device
Author(s): K. Matsumoto; A. Yamaguchi; Y. Yano; H. Tokunaga; A. Mishima; Y. Tomita; Y. Yamaoka; S. Koseki; T. Arimura
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Paper Abstract

Challenges and opportunities of MOVPE and THVPE/HVPE for nitride light emitting devices are discussed. Attempts to grow uniform and high quality epitaxial layers for both visible and UV range are presented. In order to examine the possibility of using a bulk GaN substrate, cost parity condition of GaN on GaN LED compared with LED on sapphire is presented in terms of a lumen per dollar. It is important to improve through-put of HVPE for GaN substrate manufacturing. Tri-halide VPE (THVPE) is introduced as a newly evolving technology with a high growth rate of 300μm/h at a high growth temperature of 1250ºC, which may replace HVPE for a bulk GaN substrate. Economical consideration of the comparison of HVPE and THVPE is discussed. Regarding UVC LEDs, there is an option to use a high quality AlN template on sapphire which is fabricated by 1700ºC annealing at nitrogen with a face to face configuration. Possible cost reduction and remaining issue are described.

Paper Details

Date Published: 25 February 2020
PDF: 8 pages
Proc. SPIE 11302, Light-Emitting Devices, Materials, and Applications XXIV, 113020N (25 February 2020); doi: 10.1117/12.2543943
Show Author Affiliations
K. Matsumoto, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
A. Yamaguchi, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
Y. Yano, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
H. Tokunaga, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
A. Mishima, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
Y. Tomita, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
Y. Yamaoka, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
S. Koseki, Taiyo Nippon Sanso Tsukuba Lab. (Japan)
T. Arimura, Taiyo Nippon Sanso Tsukuba Lab. (Japan)


Published in SPIE Proceedings Vol. 11302:
Light-Emitting Devices, Materials, and Applications XXIV
Jong Kyu Kim; Michael R. Krames; Martin Strassburg, Editor(s)

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