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Proceedings Paper

High-precision local transfer of van der Waals materials on nanophotonic structures (Conference Presentation)
Author(s): David Rosser

Paper Abstract

Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an in situ point for the precise pickup of two dimensional materials. We transfer transition metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of the modified dry transfer method.

Paper Details

Date Published: 10 March 2020
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Proc. SPIE 11282, 2D Photonic Materials and Devices III, 112820I (10 March 2020); doi: 10.1117/12.2543902
Show Author Affiliations
David Rosser, Univ. of Washington (United States)


Published in SPIE Proceedings Vol. 11282:
2D Photonic Materials and Devices III
Arka Majumdar; Carlos M. Torres Jr.; Hui Deng, Editor(s)

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