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Proceedings Paper

Two-Photon laser lithography for metrology and vice versa (Conference Presentation)
Author(s): Julian Hering; Matthias Eifler; Xiukun Hu; Gaoliang Dai; Jörg Seewig; Georg von Freymann

Paper Abstract

Nowadays, no consensus concerning the definition of the resolution of 3D measuring and fabricating systems is available. In contrast, the lateral resolution for 2D is generally accepted as the minimum distance between two single points/features at which the imaging/manufacturing tool fails to resolve. To extend this approach at least to 2.5D systems, we present an appropriate approach based on the instrument transfer function. First, using a commercial DLW system, we introduce the respective basics of the concept for metrology. In a second step, we use this method to determine the 3D resolution capabilities of a STED-inspired high-speed fabrication system.

Paper Details

Date Published: 10 March 2020
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Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129217 (10 March 2020); doi: 10.1117/12.2543666
Show Author Affiliations
Julian Hering, Technische Univ. Kaiserslautern (Germany)
Opti-Cal GmbH (Germany)
Matthias Eifler, Technische Univ. Kaiserslautern (Germany)
Opti-Cal GmbH (Germany)
Xiukun Hu, Physikalisch-Technische Bundesanstalt (Germany)
Gaoliang Dai, Physikalisch-Technische Bundesanstalt (Germany)
Jörg Seewig, Technische Univ. Kaiserslautern (Germany)
Opti-Cal GmbH (Germany)
Georg von Freymann, Technische Univ. Kaiserslautern (Germany)
Opti-Cal GmbH (Germany)
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM (Germany)


Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)

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