Nowadays, no consensus concerning the definition of the resolution of 3D measuring and fabricating systems is available. In contrast, the lateral resolution for 2D is generally accepted as the minimum distance between two single points/features at which the imaging/manufacturing tool fails to resolve. To extend this approach at least to 2.5D systems, we present an appropriate approach based on the instrument transfer function. First, using a commercial DLW system, we introduce the respective basics of the concept for metrology. In a second step, we use this method to determine the 3D resolution capabilities of a STED-inspired high-speed fabrication system.

Date Published: 10 March 2020
PDF
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129217 (10 March 2020); doi: 10.1117/12.2543666

Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)