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Proceedings Paper

CMOS-compatible silicon nitride waveguide photonic building blocks and their application for optical coherence tomography and other sensing applications
Author(s): Rainer Hainberger; Paul Muellner; Moritz Eggeling; Alejandro Maese-Novo; Stefan Nevlacsil; Jörg Schotter; Florian Vogelbacher; Jochen Kraft; Martin Sagmeister; Xue Zhou; Jinhua Huang; Mingzhu Li; Ke-Jian Jiang; Yanlin Song; Dana Seyringer; Elisabet Rank; Wolfgang Drexler
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Paper Abstract

In this paper, we report our recent advances in the development of CMOS compatible PECVD silicon nitride waveguide based photonic key building blocks for optical coherence tomography (OCT) in the 850 nm wavelength region and for biosensing applications in the visible domain around 650 nm wavelength. We discuss the design and experimental verification of compact low-loss waveguide bends, broadband couplers with varying power splitting ratios required for PIC based OCT systems, arrayed waveguide gratings for spectral domain OCT, and a monolithically integrated optically pumped organic solid-state laser for low-cost biosensing applications.

Paper Details

Date Published: 25 February 2020
PDF: 12 pages
Proc. SPIE 11283, Integrated Optics: Devices, Materials, and Technologies XXIV, 112830P (25 February 2020); doi: 10.1117/12.2543585
Show Author Affiliations
Rainer Hainberger, AIT Austrian Institute of Technology GmbH (Austria)
Paul Muellner, AIT Austrian Institute of Technology GmbH (Austria)
Moritz Eggeling, AIT Austrian Institute of Technology GmbH (Austria)
Alejandro Maese-Novo, AIT Austrian Institute of Technology GmbH (Austria)
Stefan Nevlacsil, AIT Austrian Institute of Technology GmbH (Austria)
Jörg Schotter, AIT Austrian Institute of Technology GmbH (Austria)
Florian Vogelbacher, AIT Austrian Institute of Technology GmbH (Austria)
Jochen Kraft, ams AG (Austria)
Martin Sagmeister, ams AG (Austria)
Xue Zhou, Institute of Chemistry (China)
Jinhua Huang, Institute of Chemistry (China)
Mingzhu Li, Institute of Chemistry (China)
Ke-Jian Jiang, Institute of Chemistry (China)
Yanlin Song, Institute of Chemistry (China)
Dana Seyringer, FH Vorarlberg (Austria)
Elisabet Rank, Medizinische Univ. Wien (Austria)
Wolfgang Drexler, Medizinische Univ. Wien (Austria)


Published in SPIE Proceedings Vol. 11283:
Integrated Optics: Devices, Materials, and Technologies XXIV
Sonia M. García-Blanco; Pavel Cheben, Editor(s)

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