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Proceedings Paper

Space-variant quarter- and half-wave plates fabricated by combining 3D laser direct writing and electroplating
Author(s): Stefan Belle; Stefan F. Helfert; Ralf Hellmann; Jürgen Jahns
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Paper Abstract

In this contribution, we present the fabrication of space-variant quarter- and half-wave plates, by combining 3D laser direct writing with electroplating. A negative of the space-variant wave plates was fabricated with 3D laser direct writing in a positive tone photoresist. With an electrochemical deposition process the negative structure of the wave plates was filled with gold. This process allows fabrication of a non-quadratic air filled cross-section surrounded by a metallic cladding, a so-called hollow waveguide array. The wave plates consists of about 1000 x 1500 hollow waveguides each with sub-wavelength dimensions for an operating wavelength of 1550 nm.

Paper Details

Date Published: 28 February 2020
PDF: 10 pages
Proc. SPIE 11292, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII, 1129212 (28 February 2020); doi: 10.1117/12.2543560
Show Author Affiliations
Stefan Belle, Univ. of Applied Sciences Aschaffenburg (Germany)
Stefan F. Helfert, FernUniv. in Hagen (Germany)
Ralf Hellmann, Univ. of Applied Sciences Aschaffenburg (Germany)
Jürgen Jahns, FernUniv. In Hagen (Germany)


Published in SPIE Proceedings Vol. 11292:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIII
Georg von Freymann; Eva Blasco; Debashis Chanda, Editor(s)

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