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Proceedings Paper

Silicon chip-integrated fiber couplers with sub-decibel loss
Author(s): Daniel Benedikovic; Carlos A. Alonso-Ramos; Sylvain Guerber; Cecilia Dupre; Bertrand Szelag; Xavier Le Roux; Pavel Cheben; Daivid Fowler; Guillaume Marcaud; Vladyslav Vakarin; Diego Perez-Galacho; Delphine Marris-Morini; Eric Cassan; Charles Baudot; Frederic Boeuf; Laurent Vivien
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Paper Abstract

Silicon nanophotonics represents a scalable route to deploy complex optical integrated circuits for multifold applications, markets, and end-users. Most recently, applications such as optical communications and interconnects, sensing, as well as quantum-based technologies, among others, present additional opportunities for integrated silicon nanophotonics to expand its frontiers from laboratories to industrial product development. Within a wide set of functionalities that silicon nanophotonic chips can afford, the availability of low-loss optical input/output interfaces has been regarded as a major practical obstacle that hampers long-term success of integrated photonic platforms. Indeed, fiber-chip interfaces based on diffraction gratings are an attractive solution to resonantly couple the light between planar waveguide circuits and standard single-mode optical fibers. Surface grating couplers provide much more alignment tolerance in fiber attach compared with most conventional edge-coupled alternatives, while retaining the much-needed control of the fiber placement on the chip surface and wafer-level-test capability that the in-plane convertors lack. Here, we report on our recent advances in the development of high-performance fiber-chip grating couplers that exploit the blazing effect. This is achieved with well-established dual-etch processing in interleaved teeth-trench arrangements or using L-shaped grating-teeth-profile geometries. The first demonstration of the L-shaped-based grating coupler yielded a coupling loss of -2.7 dB, seamlessly fabricated into a 300-mm foundry manufacturing process using 193-nm deep-ultraviolet stepper lithography. Moreover, silicon metamaterial L-shaped fiber couplers may promote robust sub-decibel coupling of light, reaching a simulated coupling loss of -0.25 dB, while featuring device layouts (>120 nm) compatible with lithographic technologies in silicon semiconductor foundries.

Paper Details

Date Published: 26 February 2020
PDF: 9 pages
Proc. SPIE 11284, Smart Photonic and Optoelectronic Integrated Circuits XXII, 112840L (26 February 2020); doi: 10.1117/12.2543489
Show Author Affiliations
Daniel Benedikovic, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Carlos A. Alonso-Ramos, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Sylvain Guerber, LETI Univ. Grenoble Alpes, CEA, LETI (France)
Cecilia Dupre, LETI Univ. Grenoble Alpes, CEA, LETI (France)
Bertrand Szelag, LETI Univ. Grenoble Alpes, CEA, LETI (France)
Xavier Le Roux, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Pavel Cheben, National Research Council Canada (Canada)
Daivid Fowler, LETI Univ. Grenoble Alpes, CEA, LETI (France)
Guillaume Marcaud, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Vladyslav Vakarin, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Diego Perez-Galacho, Univ. Politécnica de València (Spain)
Delphine Marris-Morini, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Eric Cassan, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)
Charles Baudot, STMicroelectronics SAS (France)
Frederic Boeuf, STMicroelectronics SAS (France)
Laurent Vivien, Univ. Paris-Saclay, CNRS, Ctr. de Nanosciences et de Nanotechnologies (France)


Published in SPIE Proceedings Vol. 11284:
Smart Photonic and Optoelectronic Integrated Circuits XXII
Sailing He; Laurent Vivien, Editor(s)

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