Share Email Print
cover

Proceedings Paper

A study of subwavelength grating waveguide and coupling structures for 0.18 um CMOS process
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

Subwavelength grating (SWG) structures can greatly improve the design flexibility of silicon photonic integrated circuits. Most SWG structures reported in the literature so far are fabricated with electron beam lithography, limiting their use in mass production. In this work, a study has been carried out for the SWG waveguide and coupling structures that are compatible with 0.18 μm CMOS process. The optical propagation in this SWG waveguide has been analyzed, and the loss of coupling structures between solid silicon waveguide and SWG waveguide have been studied through simulation and measurement. The overall results show a potential of the design and fabrication of SWG waveguides with 0.18 μm CMOS process.

Paper Details

Date Published: 12 March 2020
PDF: 6 pages
Proc. SPIE 11440, 2019 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices, 114400C (12 March 2020); doi: 10.1117/12.2543488
Show Author Affiliations
Shuo Wang, Institute of Microelectronics (China)
Bin Wang, Institute of Microelectronics (China)
Tianfei Hou, Institute of Microelectronics (China)
Changchun Univ. of Science and Technology (China)
Fusheng Zhao, Institute of Microelectronics (China)


Published in SPIE Proceedings Vol. 11440:
2019 International Conference on Optical Instruments and Technology: Micro/Nano Photonics: Materials and Devices
Baojun Li; Xingjun Wang; Ya Sha Yi, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray